Hao, Yilong

Professor

Research Interests: MEMS

Office Phone: 86-10-6275 5145

Email: haoyl@pku.edu.cn

Hao, Yilong is a professor in the Department of Microelectronics Science and technology, School of EECS. He obtained his B.Sc. ,M.Sc and Ph.D. from Peking University in 1985, 1991 and 2004 respectively. His research interests include Microelectromechanical Systems and GaN device .

Dr. Hao has published more than 100 research papers and more than 50 patents, the most of papers are published in top-tier conferences and journals, such as MEMS, Transducers, IEEE ED,IEEE EDL and JMM. He served as Director of the Institute of Microelectronics Peking University from 2007 to 2012 and vice president of China Society of micro and nano technology from 2005 to 2016. He was awarded the Beijing science and Technology Progress Award and the national invention award in 2002 and 2006 respectively.

Dr. Hao has more than ten research projects including NSFC, 973 programs, 863 project, Major national special program, etc. His research achievements are summarized as follows:

1)  Microelectromechanical Systems: Developed surface sacrificial process, put forward the method of Anti stiction technology, developed different kind of accelerometers, including resonant, piezoresistive and capacitive accelerometer, presided over the development of the high precision vibration sensor.

2)  GaN device: Together with team members, we have developed the GaN structure and its fabrication process based on the surface active charge mechanism, including HEMT devices and power switching devices.