Zhang, Jinwen
Professor
Research Interests: MEMS/NEMS
Office Phone: 86-10-6276 6597
Email: jwzhang@ime.pku.edu.cn
Zhang, Jinwen is a professor in the Department of Microelectronics, School of EECS. He obtained his B.Sc. from Shanghai Jiaotong University in 1991, and Ph.D. from Peking University in 2005 respectively. Her research interests include Micro/Nano fabrication technology, micro-power, radiation micro-sensors and micro-batteries.
Dr. Zhang has published more than 80 research papers, and most of them are published in top-tier conferences and journals, such as JMM, S&A, MEMS, Transducers.
Dr. Zhang has more than ten research projects including NSFC, 973 programs, 863 project, etc. Her research achievements are summarized as follows:
1) Micro power: She proposed a novel electrode structure to realize the controllable distribution of electric field intensity, which overcomes the difficulty in electret charging and improves the charging of electret on the glass substrate. She also proposed PECVD SiO2/Si3N4 double-layer as electret, which improves the compatibility and performance of the micro generator. The vibration harvesting structure based on the microballs sliding in silicon V-grooves proposed not only avoids cantilevers attaching to electrets in traditional micro electret power generators, but also has high sensitivity to low frequency and weak vibration.
2) Wafer-level vacuum packaging technology: She proposed a micro-Pirani vacuum gauge with high aspect ratio structure of the bulk silicon which is very sensitivity, and feasible to be encapsulated in the microcavity with other MEMS devices. The wafer-level vacuum seal technological process comprises chemical mechanical polishing and triple-layer vacuum bonding. The special getter thin film was deposited and patterned for acquiring and maintaining high vacuum in the microcavity. The glass substrate was etched through to form the via-hole, and the metallized via-hole achieved electrical interconnection between the inside sensors and the outside circuits. Finally, the vacuum of the sealed microcavity is controllable and has long-term stability.
3) Micro radiation dosimeter and radioisotope betavoltaic microbattery: The real time auto-measurment system was proposed for monitoring the performance of RADFET radiation dosimeter. She also proposed the MEMS-made MOS radiation dosimeter to improve the sensitivity through thick oxide layer structure with high defect density. The carbon nanotubes was introduced in the radioisotope betavoltaic batteries which significantly increases the conversion efficiency of the radioisotope battery.
